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Semiconductor Wafer MI Cable Pedestal Heater Precision Engineered

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Pasia Industries Ltd
Province/State:zhejiang
Country/Region:china
Contact Person:Warren Sun
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Semiconductor Wafer MI Cable Pedestal Heater Precision Engineered

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Brand Name :MICH
Model Number :PESWMICPH
Certification :ISO9001
Place of Origin :China
MOQ :1 piece
Price :USD20-USD200,000
Supply Ability :As per the product output capacity
Delivery Time :in one month
Packaging Details :plywood crates
Heating Element :mineral insulated heating cable
Property :Precision engineered
Industry :Wafer
Structure :Pedestal
Output :3-25 KW
Voltage :220, 380, 600 etc
Power Phases :2 or 3
Immersion Length :up to 6600 mm
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Precision Engineered Semiconductor Wafer Mineral Insulated Cable Pedestal Heater is designed and manufactured based on the clients' complete requirement. It is suitable for custom-engineered high-uniformity pedestals for a variety of processes, including CMP, photolithography, ash/strip, deposition, ion implant, and so on.

A cast-in MI cable heater offers several advantaged properties against conventional technologies and products.

With the cast-in design, heating elements intimately contact with the metal substrate, delivering uniform heat transfer and possessing longer service life, for lowered manufacturing and maintenance costs.

The semiconductor equipment manufacturers may work with MICH for

Complete Controlled manufacturing process: traceability on records, trusted subcontractor assessment, internal and external audits, regulatory compliance etc.
Integrated project management team for key projects
Strong R&D capability for innovations

Advanced designing and manfuacturing capacity for various options and complete supply range.

Properties

1. The electric heating rod uses the mineral insulation (MI) heating cable developed by MICH as the heating element.

2. The electric heating rod has a solid structure, high flexural strength, compactness, sealing and explosion-proof, and meets the requirements for heating and heat tracing of various types of storage tanks for petroleum and its products with an explosion-proof grade dIIB T1~T6.

3. The electric heating rod heats uniformly, low surface heat load, reliable operation and long service life, no reactive power loss, high thermal efficiency, easy operation and maintenance and no daily maintenance required.

4. The electric heating rod has good corrosion resistance to crude oil and its finished products.

Specifications, models and working environment requirements

Semiconductor Wafer MI Cable Pedestal Heater Precision Engineered

Model and specification sheet

Table 1 Model and Specification of Straight Tank Electric Heating Rod

No. Model Nominal power (Kw) Rated voltage (V) Operating current (A) Number of power phases Rod Outer diameter × length (mm) Insertion length (mm) Mounting short section size (mm) Total weight (kg)
1 DRB-3/220/1600 3 220 13.6 1 Ф127×1600 1300 Ф159×5 52
2 DRB-5/220/2200 5 220 22.5 1 Ф127×2200 1900 Ф159×5 65
3 DRB-8/220/2800 8 220 36.4 1 Ф127×2800 2500 Ф159×5 95
4 DRB-9/3/660/3600 9 660 13.6 3 Ф127×3600 3300 Ф159×5 102
5 DRB-12/3/660/5000 12 660 18.2 3 Ф127×5000 4700 Ф159×5 112
6 DRB-15/3/660/5600 15 660 22.7 3 Ф127×5600 5300 Ф159×5 142
7 DRB-24/3/660/6400 24 660 36.4 3 Ф127×6400 6100 Ф159×5 170
8 DRB-3/3/380/1300 3 380 4.5 3 Ф127×1300 1000 Ф159×5 65
9 DRB-5/3/380/2200 5 380 7.5 3 Ф127×2200 1900 Ф159×5 80
10 DRB-9/3/380/3400 9 380 13.6 3 Ф127×3400 3400 Ф159×5 110
11 DRB-12/3/380/5036 12 380 18.2 3 Ф127×5036 4565 Ф159×5 98
12 DRB-15/3/380/5600 15 380 22.7 3 Ф127×5600 5300 Ф159×5 142
13 DRB-24/3/380/6400 24 380 36.4 3 Ф127×6400 6100 Ф159×5 170

Table 2 Model and Specification of Right Angle Tank Electric Heating Rod

No. Model Nominal power (Kw) Rated voltage (V) Operating current (A) Number of power phases Rod Outer diameter × length (mm) Immersion length (mm) Total weight (kg)
1 DRB-3/220/1600/L 3 220 13.6 1 Ф127×1600 1600 57
2 DRB-5/220/2200/L 5 220 22.5 1 Ф127×2200 2200 70
3 DRB-8/220/2800/L 8 220 36.4 1 Ф127×2800 2800 100
4 DRB-9/3/660/3600/L 9 660 13.6 3 Ф127×3600 3600 107
5 DRB-12/3/660/5000/L 12 660 18.2 3 Ф127×5000 5000 117
6 DRB-15/3/660/5600 15 660 22.7 3 Ф127×5600 5600 147
7 DRB-2/3/380/1100/L 2 380 3.0 3 Ф127×1100 1100 60
8 DRB-3/3/380/1300/L 3 380 4.5 3 Ф127×1300 1300 70
9 DRB-5/3/380/1900/L 5 380 7.5 3 Ф127×1900 1900 90
10 DRB-9/3/380/3400/L 9 380 13.6 3 Ф127×3400 3400 115
11 DRB-12/3/380/5000/L 12 380 18.2 3 Ф127×5000 5000 109
12 DRB-15/3/380/5600/L 15 380 22.7 3 Ф127×5600 5600 147

Note: The specifications above are regular ones with other specifications customizable according to user’s requirements, and the installation nipple joint is suppliable with the product.

3. Working environment requirements:

3.1 Ambient temperature: -30 ° C ~ +40 ° C

3.2 Voltage fluctuations are: -10% to +5%

3.3 Altitude: not required

3.4 Relative humidity of the environment: less than 95%

4, working principle and structure

1. working principle

The electric heating rod adopts a mineral insulated (MI) heating cable as heating element. The inner cavity of the rod can rapidly conduct heat that are fully transmitted to the rod body and released to the medium through the outer surface of the rod, and the electric energy is all converted into heat energy with a high heat transfer efficiency.


Figure 1: Schematic diagram of Straight Tank Electric Heating Rod Structure

Semiconductor Wafer MI Cable Pedestal Heater Precision Engineered

1 Rod Casing 2 Core Tube 3 Mineral Insulated Heating Cable 4. Over-temperature Protective Sensor 5. Junction Box 6. Installation Nipple Joint

Figure 2: Schematic diagram of DRB--L (right angle) electric heating rod

Semiconductor Wafer MI Cable Pedestal Heater Precision Engineered

1 Mineral Insulated Heating Cable 2 Outer Casing 3 Core Tube 4 Over Temperature Protection Sensor 5 Junction Box

Note: DRB--L type is a special structure of DRB type electric heating rod, which is specially designed for small oil tanks already in use. It can be installed in tank man hole without cleaning the inside or re-opening a new hole. The heating part is in the lower horizontal section while the vertical part is only the lead-out line section. The joint flange is arranged at the upper end of the vertical section, and the electrical wiring can be adjusted in a suitable direction and position.

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